Almost every material's property changes with scale. We will examine ways to make micro- and nano-structured materials and discuss their mechanical, electrical, and chemical properties. Topics include the physics and chemistry of physical vapor deposition, thin film patterning, and microstructural characterization. Particular attention will be paid to current technologies including computer chips and memory, thin film sensors, diffusion barriers, protective coatings, and microelectromechanical (MEMS) devices

Course notes: 

Part-time students should register for the 515 course.