Introduction to Micro- and Nano-fabrication - 515.654

This course covers the principles of micro(nano)-fabrication processes for creation of electronic/optical/mechanical devices. The course exposes students to clean room etiquette and safety, film deposition, lithography, etching (dry/wet), vacuum systems, oxide growth, etc. and will familiarize students with use of various techniques, systems and equipment commonly encountered in microfabrication facilities. This course also introduces students to various characterization techniques by introducing concepts such as crystallography/semiconductor physics and electromagnetism/optics/microscopy at an introductory level. The course includes the necessary background for students so they can specify fabrication processes for particular device designs.